Material or article handling – Vertically swinging load support
Reexamination Certificate
2007-09-11
2007-09-11
Berman, Jack I. (Department: 2881)
Material or article handling
Vertically swinging load support
C250S492210, C250S442110, C250S398000, C294S119100
Reexamination Certificate
active
11099022
ABSTRACT:
The present invention is directed to a scanning apparatus and method for processing a workpiece, wherein the scanning apparatus comprises a wafer arm and moving arm fixedly coupled to one another, wherein the wafer arm and moving arm are operable to rotate about a first axis. An end effector, whereon the workpiece resides, is coupled to the wafer arm. A rotational shaft couples the wafer arm and moving arm to a first actuator, wherein the first actuator provides a rotational force to the shaft. A momentum balance mechanism is coupled to the shaft and is operable to generally reverse the rotational direction of the shaft. The momentum balance mechanism comprises one or more fixed spring elements operable to provide a force to a moving spring element coupled to the moving arm. A controller is further operable to maintain a generally constant translational velocity of the end effector within a predetermined scanning range.
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Asdigha Mehran
Benveniste Victor M.
Brown Douglas A.
Kellerman Peter L.
Saadatmand Kourosh
Axcelis Technologies Inc.
Berman Jack I.
Eschweiler & Associates LLC
Hashmi Zia R.
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