Wafer rotation device and edge flaw inspection apparataus...

Details Wafer rotation device and edge flaw inspection apparataus... Wafer rotation device and edge flaw inspection apparataus...

2007-08-14

2007-08-14

Estrada, Michelle (Department: 2823)

Metal working

Barrier layer or semiconductor device making

Reexamination Certificate

active

10523844

ABSTRACT:
A wafer rotating device1is provided with at least three rollers2rotatably provided about axes arranged at parallel intervals and which rotate over the circumferential surface of a disk-shaped wafer5, a rotation drive mechanism3that rotates and drives at least one of the rollers2, an interval adjustment mechanism4capable of adjusting the dimensions of the intervals of the rollers2, a load control device6that controls the load applied from the rollers2to the wafer5in the radial direction of the wafer5when the wafer5is clamped between rollers2. As a result, a silicon wafer can be rotated without contacting the top and bottom surfaces of the silicon wafer.

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International Search Report dated Nov. 11, 2003.

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