Wafer rinsing apparatus

Details Wafer rinsing apparatus Wafer rinsing apparatus

1993-04-12

1994-10-25

Rose, Robert A.

Abrading

Machine

Sandblast

451 96, 451 38, 451 39, B24C 332

Patent

active

053577183

ABSTRACT:
A wafer rinsing apparatus includes an ice making hopper for making ice particles by heat exchange between fine droplets of liquid to be frozen and low-temperature liquefied gas. The ice making hopper is connected to a separation device for separating the ice particles and vaporized gas generated from the low-temperature liquefied gas. The ice particles separated by the separation device are jetted onto a wafer by a jetting device, thereby rinsing the surface of the wafer.

REFERENCES:
patent: 4932168 (1990-06-01), Tada et al.
patent: 5035750 (1991-07-01), Tada et al.
patent: 5129198 (1992-07-01), Kanno et al.

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