Cleaning and liquid contact with solids – Apparatus – Electrically controlled
Patent
1990-06-21
1991-03-19
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
Electrically controlled
134113, 134115R, 134147, 134200, 134 99, 134151, 134902, B08B 302
Patent
active
050002082
ABSTRACT:
Improvements to an integrated circuit wafer rinsing and washing machine which include a streamlined housing for low turbulence air flow, improved rear maintenance capability, improved wafer carriers, foot operated switches and improved rotating part fastening means.
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Cathey David A.
Dunn L. Brian
Gibbons Loyal R.
Jurica Leo B.
Ludwig Bryan J.
Fox III Angus C.
Micro)n Technology, Inc.
Protigal Stanley N.
Stinson Frankie L.
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