Wafer ring supply and return device

Details Wafer ring supply and return device Wafer ring supply and return device

1996-08-16

1998-12-29

Osele, Mark A.

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

Presses or press platen structures, per se

156344, 414935, 414937, 438464, B32B 3500

Patent

active

058535322

ABSTRACT:
A device for conveying a wafer ring between a wafer ring container and a pellet pick-up device. A pair of guide rails which guide both side edges of a wafer ring that is conveyed by a wafer ring conveying assembly are installed pivotally in a vertical direction near the wafer ring cassette. The guide rails are pivoted so as to take a horizontal position when the conveying of the wafer ring is performed and take a vertical position when the pellet pick-up device is in operation. Thus, the operation of the pellet pick-up device is not hindered by the guide rails.

REFERENCES:
patent: 4584045 (1986-04-01), Richards
patent: 4638601 (1987-01-01), Steere et al.
patent: 5478428 (1995-12-01), Carpenter

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