Wafer ring feeding apparatus

Details Wafer ring feeding apparatus Wafer ring feeding apparatus

1997-09-30

2000-05-16

Keenan, James W.

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Rack moved vertically by elevating means

414417, 414936, B65G 4907

Patent

active

060627956

ABSTRACT:
A device for preventing wafer rings from being caught on a pair of guide rails of a wafer ring conveying apparatus, including an open-and-close mechanism which moves the pair of guide rails in a closing direction when a wafer ring is supplied onto the guide rails from the wafer ring cassette so as to correct the rotational orientation and/or offset of the wafer ring.

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patent: 4712963 (1987-12-01), Kondo
patent: 4958722 (1990-09-01), Kobayahsi et al.
patent: 5520276 (1996-05-01), Aoki et al.
patent: 5562382 (1996-10-01), Miyoshi
patent: 5824185 (1998-10-01), Nakamura et al.
patent: 5827035 (1998-10-01), Fuke et al.
patent: 5848868 (1998-12-01), Suzuki et al.
patent: 5853532 (1998-12-01), Nakamura et al.

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