Wafer reuse techniques

Details Wafer reuse techniques Wafer reuse techniques

2006-08-29

2006-08-29

Pham, Thanhha (Department: 2813)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

Electrical characteristic sensed

C438S014000

Reexamination Certificate

active

07098047

ABSTRACT:
Briefly, test wafer reuse techniques.

REFERENCES:
patent: 4526468 (1985-07-01), Steigmeier et al.
patent: 6406981 (2002-06-01), Ravi
patent: 6761625 (2004-07-01), Rojhantalab et al.

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