Wafer retaining platen having peripheral clamp and wafer lifting

Details Wafer retaining platen having peripheral clamp and wafer lifting Wafer retaining platen having peripheral clamp and wafer lifting

1993-06-14

1994-09-27

Chaudhuri, Olik

Metal working

Barrier layer or semiconductor device making

118503, 118730, 279131, 437925, B05C 1300, B05C 1102

Patent

active

053504275

ABSTRACT:
An apparatus for releasably holding a workpiece in semiconductor process systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of the platen for clamping the wafer against the fence of the supporting means and pusher means mounted on wafer lift means for engagement with the lever mechanism for locking and unlocking the device, and sensing any misclamp of the workpiece.

REFERENCES:
patent: 3993018 (1976-11-01), Kranik et al.
patent: 4677758 (1987-07-01), Algo
patent: 4744713 (1988-05-01), Hrovath
patent: 4817556 (1989-04-01), Mears et al.
patent: 4971676 (1990-11-01), Dove et al.
patent: 5040484 (1991-08-01), Mears et al.

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