Wafer retaining mechanism

Details Wafer retaining mechanism Wafer retaining mechanism

1997-12-19

1999-04-06

Sewell, Paul T.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206454, B65D 8548

Patent

active

058905979

ABSTRACT:
Disclosed is a wafer retaining mechanism comprising a box, and more than one link unit affixed to appropriate locations of the box, the link units being operative in coordination with a wafer cassette and a chassis for retaining securely the wafers received within the cassette. The links each comprises a sliding link, a lower link, a front link, an upper link, and associated pins.

REFERENCES:
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4815912 (1989-03-01), Maney et al.
patent: 5452795 (1995-09-01), Gallagher et al.
patent: 5740845 (1998-03-01), Bonora et al.

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