Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
Patent
1997-02-21
1998-12-01
Jordan, Charles T.
Special receptacle or package
Holder for a removable electrical component
For a semiconductor wafer
B65D 8102
Patent
active
H00017620
ABSTRACT:
Disclosed is an apparatus and method for restraining flat objects such as semiconductor wafers within a cassette placed inside a box or pod to prevent movement or vibration of the flat objects during storage or transport. A flexible or inflatable tube contacts and conforms to the edge of the objects to eliminate movement and provide vibrational damping without hard surface contact or damage. The tube may be deflated or removed from contact with the wafers to allow removal of the wafers from the cassette.
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Kaempf Ulrich
Scott Rick
Chelliah Meena
Jordan Charles T.
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