Wafer restraining device

Details Wafer restraining device Wafer restraining device

1997-12-05

1999-08-31

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With non-impelling fluid deflector or baffle other than...

134902, 206711, 206454, 269903, 269287, B08B 300

Patent

active

059440384

ABSTRACT:
A wafer restraining device clips onto a semiconductor wafer cassette. The wafer restraining device is provided with at least one opening to allow bubbles forming during acid baths on excess resist-covered semiconductor wafers to escape. Portions of the wafer restraining device only contact the periphery of the sensitive, disc-shaped semiconductor wafers.

REFERENCES:
patent: 4471716 (1984-09-01), Milliren
patent: 4687097 (1987-08-01), Mortensen
patent: 4721207 (1988-01-01), Kikuchi
patent: 4747488 (1988-05-01), Kikuchi
patent: 5782362 (1998-07-01), Ohori

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