Image analysis – Applications – Manufacturing or product inspection
Patent
1997-06-23
1999-08-03
Boudreau, Leo H.
Image analysis
Applications
Manufacturing or product inspection
359855, G02B 2714, G06K 900
Patent
active
059335211
ABSTRACT:
A wafer reader for reading scribes from the surface of semiconductor wafers uses a mirror assembly with a series of stationary mirrors spaced apart so that the mirrors can be inserted between wafers in a cassette. The mirror assembly enables a reader unit to read each scribe without displacing the wafer that it is reading or the adjacent wafers. The reader unit can include a single camera that moves relative to a stationary cassette assembly for holding a cassette or a moving cassette the moves past a fixed reading position of a single, stationary camera. Alternatively, the reader unit can include more than one stationary camera, each capable of reading more than one wafer in a cassette. The reader can use either bright or dark field lighting. In either case, each mirror in the mirror assembly re-directs light depicting a wafer scribe from the surface of an adjacent wafer to the camera assembly.
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Brochure: PST lot verification system, Progressive System Technologies.
Brochure: Lot and wafer identification machine from a company named RECIF.
Boudreau Leo H.
Pasic Engineering, Inc.
Werner Brian P.
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