Wafer proximity sensor

Details Wafer proximity sensor Wafer proximity sensor

1991-05-31

1992-11-17

Razavi, Michael

Measuring and testing

With fluid pressure

Dimension, shape, or size

G01B 1308

Patent

active

051633124

ABSTRACT:
The distance between a semiconductor wafer and a bake/chill plate is determined by a feed back system using a flow meter. The wafer forms part of the feed back system by limiting the flow of air or gas between the wafer and bake/chill plate, the distance between the wafer and bake/chill plate determining the amount of flow of air or gas through the flow meter.

REFERENCES:
patent: 3400573 (1968-09-01), Matter
patent: 4142401 (1979-03-01), Wilson
patent: 4607525 (1986-08-01), Turner et al.
IBM Technical Disclosure Bulletin, vol. 6; No. 7; Dec. 1963, Fernekees.
IBM Technical Disclosure Bulletin, vol. 21; No. 8; Jan. 1979, Benzi et al.

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