Wafer protective cassette

Details Wafer protective cassette Wafer protective cassette

2006-03-28

2006-03-28

Novosad, Jennifer E. (Department: 3634)

Supports: racks

Special article

Platelike

C206S833000

Reexamination Certificate

active

07017758

ABSTRACT:
A substrate cassette having a conventional form, an open container having an upper entrance and a narrow lower opening formed by two side panels and two end panels. A preferred embodiment includes a train of substrate alignment channels on the inner surfaces of the two side panels, each channel is U shaped and having planar surface with a left surface, a right surface, and a bottom surface. An arcuate curbing member disposed on a left surface in each of the substrate alignment channels. The arcuate curbing member includes a top end with a thinner sloped profile facing the upper open entrance of the cassette allowing a substrate to slide through and under a stepped lower end.

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patent: 6341703 (2002-01-01), Wu
patent: 6427850 (2002-08-01), Mendiola

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