Wafer processing techniques for near field magneto-optical head

Metal working – Method of mechanical manufacture – Electrical device making

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369 4415, 2960312, H01F 4102

Patent

active

060948035

ABSTRACT:
A method of making and self-aligning a disk data storage read/write head that uses a catadioptric focusing device (or lens) having a high numerical aperture (NA), which does not introduce significant spot aberration on a storage medium. The manufacturing process of the head is carried out at a wafer level, and is facilitated significantly by the flatness of the focusing device. An exemplary manufacturing process is implemented as follows: A lens coil/plate is formed by molding a flat optical substrate to form the desired lens shapes. Coil cavities or depressions are formed simultaneously with the lens to accommodate a coil. Conductive plugs are formed in proximity to cutting lines for wire bonding attachment to the coil. A slider wafer is formed and bonded to the lens/coil wafer. Coils and pedestals are also formed on the lens/coil plate using thin-film processing techniques, and reflective surfaces are deposited on the bottom surface of the substrate, opposite the lens. The focusing device includes an incident surface, a reflective surface, a focal pedestal, and a body. The incident surface is generally flat and is comprised of a central diffractive, optically transmissive surface and a peripheral reflector. The peripheral reflector is comprised of a reflective-diffractive surface, or alternatively, a reflective-kinoform phase profile.

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patent: 5689480 (1997-11-01), Kino
Lee, C.W., et al., "Feasibility Study on Near Field Optical Memory Using A Catadioptric Optical System", Optical Data Storage, Technical Digest Series, vol. 8, pp. 137-139, May 10-13 1998.
Mansipur, M., et al. "Parallel Processing", 42 Optics and Photonics News, pp. 42-45, Jun. 1998.

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