Special receptacle or package – For plate or sheet – Fragile or sensitive
Patent
1986-09-29
1988-02-16
Foster, Jimmy G.
Special receptacle or package
For plate or sheet
Fragile or sensitive
206334, 211 41, B65D 8530
Patent
active
047249633
ABSTRACT:
Wafer processing cassette for the processing of silicon wafers, which includes a plurality of open, reinforced, dual cross-section profiled wafer dividers for structural integrity and for supporting a plurality of wafers in alignment in opposing mirror image dividers of the cassette for automated robotic processing of the wafers while in the cassette. The cassette utilizes a cross-bar end with a configured rod reinforced open cross-bar, which is fully functional and strategically located for structural integrity. The dividers are supported by two pairs of longitudinal horizontal supports secured to ends providing for a multi-level, flow-through, open area between each of the dual profile geometrically configured dividers for ease of entry and passage of liquids during automated processing. Rapid fluid flow and drying of the cassette is effected using extra smooth cassette surfaces, rounded edges, filled corners, drain recesses, drain scuppers, and ramped surfaces. The rear area includes a downward arch. The processing wafer cassette provides for on-center processing where the carrier center of gravity is on-center of the axis of centrifugal wafer processing machinery. Each of the dual profile dividers and wash slots cross-sections are geometrically configured for passage of chemicals during processing.
REFERENCES:
patent: 3923156 (1975-12-01), Wallestad
patent: 3939973 (1976-02-01), Wallestad
patent: 3961877 (1976-06-01), Johnson
patent: 4471716 (1984-09-01), Milliren
patent: 4493418 (1985-01-01), Johnson
Empak Inc.
Foster Jimmy G.
Jaeger Hugh D.
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