Wafer processing cassette

Details Wafer processing cassette Wafer processing cassette

1983-08-17

1985-01-15

Dixson, Jr., William T.

Special receptacle or package

For plate or sheet

Fragile or sensitive

118500, 211 40, 206328, 220 83, B65D 2528, B65D 8530, B65D 134, B65G 300

Patent

active

044934181

ABSTRACT:
Wafer cassette for processing of wafers which includes a plurality of open supported wafer dividers for supporting a plurality of wafers in alignment in opposing dividers of the cassette for automated processing of the wafers while in the cassette. The wafer cassette utilizes an H-bar end with a configured rod reinforced open front which is fully functional and strategically located. The dividers are supported by longitudinal horizontal supports secured to the ends providing for open area between each of the dividers for passage of liquids during automated processing. The cassette provides open area about the H-bar end. The rear end which includes a downward arch and through the dividers for open, non-restricted automated processing of wafers. The processing wafer cassette provides for "on-center" processing where the carrier center of gravity is on-center of the axis of centrifugal wafer processing machinery.

REFERENCES:
patent: 3923156 (1975-12-01), Wallestad
patent: 3926305 (1975-12-01), Wallestad
patent: 3934933 (1976-01-01), Worden
patent: 3939973 (1976-02-01), Wallestad
patent: 3961877 (1976-06-01), Johnson

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