Wafer processing apparatus having dust proof function

Details Wafer processing apparatus having dust proof function Wafer processing apparatus having dust proof function

2003-11-14

2009-10-27

Moore, Karla (Department: 1792)

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

C414S217000, C414S935000, C414S939000

Reexamination Certificate

active

07607880

ABSTRACT:
The wafer processing apparatus includes a chamber that is pressurized to a pressure that is higher than the pressure of the exterior thereof, an opening portion through which the interior and the exterior of the chamber are in communication with each other, and a door that closes the opening portion. When the opening portion is closed by the door, a portion of the opening remains as an aperture uncovered by the door. In conventional semiconductor wafer processing apparatus, the interior of the apparatus is sealed and pressurized in order to keep a high degree of cleanness in the wafer processing portion, and therefore airflow is generated due to a pressure difference between the interior and the exterior of the apparatus. With the above feature of the invention, it is possible to suppress creation of such airflow and prevent dust from entering the wafer processing apparatus to eliminate wafer contamination.

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