Wafer processing apparatus capable of mapping wafers

Details Wafer processing apparatus capable of mapping wafers Wafer processing apparatus capable of mapping wafers

2006-01-10

2006-01-10

Porta, David (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559280, C250S559400, C414S411000, C414S416030, C414S416080, C414S937000

Reexamination Certificate

active

06984839

ABSTRACT:
A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a detector forming a slot therebetween. The emitter and the detector are moved toward the opening in the pod and are plunged into the interior of the pod after a door is opened by the door unit, and the slot between the emitter and the detector crosses an end portion of a wafer to thereby detect the presence or absence of the wafer. Thereby, a mechanism portion liable to produce dust which may adhere to the wafer and cause the contamination thereof can be disposed separately from the pod.

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