Wafer probing test machine

Details Wafer probing test machine Wafer probing test machine

1992-02-19

1994-01-11

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, G01R 3102

Patent

active

052784940

ABSTRACT:
A wafer probing test machine including a loading/unloading section defined by a first frame to enclose plurality of cassette stages therein, a test section defined by a second frame for enclosing a test stage therein, an elevator for moving at least one of the cassette stages up and down, and a wafer transfer system having a multi-jointed arm for taking out the wafer from a cassette and transferring the wafer onto the test stage.

REFERENCES:
patent: 4775281 (1988-10-01), Prentakis
patent: 4943767 (1990-07-01), Yokota
patent: 4950982 (1990-08-01), Obikane
patent: 5077523 (1991-12-01), Blanz
patent: 5084671 (1992-01-01), Miyata et al.
patent: 5086270 (1992-02-01), Karasawa et al.

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