Wafer probing system and method that stores reference pattern an

Details Wafer probing system and method that stores reference pattern an Wafer probing system and method that stores reference pattern an

1995-09-28

1997-04-15

Nguyen, Vinh P.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324758, G01R 104

Patent

active

056213131

ABSTRACT:
A method for aligning a wafer probing system includes securing a wafer to a movable table; moving the table a predetermined reference position below an image sensing device for sensing a wafer circuit pattern of the wafer; transmitting the sensed wafer circuit pattern to an alignment adjustment device; bringing the table to a correlated reference position; moving the table to a first movement amount below a probing device; comparing the first movement amount to a first stored movement amount data; and moving the table a second stored movement amount such that at least one electrode pad of the wafer contacts a probe of the probing device, wherein the second stored movement amount is determined by comparison of the first movement value with the first stored movement amount data.

REFERENCES:
patent: 4677474 (1987-06-01), Sato et al.
patent: 4929893 (1990-05-01), Sato et al.
patent: 4934064 (1990-06-01), Yamaguchi et al.
patent: 5254939 (1993-10-01), Anderson et al.
patent: 5410259 (1995-04-01), Fujhara et al.

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