Wafer prober and a probe card to be used therewith

Details Wafer prober and a probe card to be used therewith Wafer prober and a probe card to be used therewith

1985-06-12

1988-07-05

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, G01R 3102

Patent

active

047557478

ABSTRACT:
A probing apparatus for use in examination of a chip formed on a wafer, the probing apparatus including a holder for holding the wafer, a support for supporting a sheet-like member having a probe to be contacted to the chip on the wafer, a driving unit for displacing the wafer relative to the sheet-like member, and a detecting system for reading a record carried on the sheet-like member. In another aspect of the invention, there is provided a probe card for use in examination of a tip formed on a wafer, the probe card including a flat plate member having an aperture, a plurality of fine conductive members each extending from a peripheral portion of the flat plate member around the aperture toward a central portion of the aperture, each of the fine conductive members having a free end extending beyond one of the surfaces of the flat plate member, and a record carried on the flat plate member and capable of being sensed from a sensor disposed opposed to the one surface.

REFERENCES:
patent: 3405361 (1968-10-01), Kattner et al.

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