Wafer prober

Details Wafer prober Wafer prober

1994-11-25

1996-10-22

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

3241581, G01R 3102

Patent

active

055680569

ABSTRACT:
A test head is rotatably supported by a main body of device. This test head is rotatable between an inspecting position electrically connected to a probe card and a retracted position being retracted from the inspecting position. The test head is connected thereto with a cylinder for weight balance for decreasing the tare of the test head, and the center of rotation of the connecting point of the cylinder for weight balance is made eccentric from the center of rotation of the test head. With this arrangement, the balancing force of the cylinder for weight balance can be rendered to the test head without fluctuations. As described above, the balancing force can be rendered to the test head during the rotation of the test head without fluctuations, so that the rotating operation of the test head can be facilitated.

REFERENCES:
patent: 4638680 (1987-01-01), Albrecht
patent: 4667155 (1987-05-01), Coiner et al.
patent: 4812754 (1989-03-01), Tracey et al.
patent: 4875005 (1989-10-01), Terada et al.
patent: 5489853 (1996-02-01), Nakajima

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