Wafer prober

Details Wafer prober Wafer prober

1990-03-12

1991-04-23

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, G01R 106, G01R 3102

Patent

active

050102966

ABSTRACT:
A wafer prober includes a supporting device for supporting a wafer on which a plurality of electrode pads are disposed, a plurality of probes for contacting respective electrode pads, a spraying device for spraying a gas onto the electrode pads contacted by the plurality of probes, and an aspirating device for aspirating waste generated by the contact of the probes with the electrode pads and carried by the gas.

REFERENCES:
patent: 4791364 (1988-12-01), Kufis et al.

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