Wafer prober

Details Wafer prober Wafer prober

1985-06-27

1987-06-30

Britton, Howard W.

Facsimile and static presentation processing

Facsimile

Specific signal processing circuitry

324158P, H04N 718

Patent

active

046774742

ABSTRACT:
A probing apparatus for use in examination of a chip formed on a wafer, in co-operation with a sheet-like member having probe needles to be contacted to the chip on the wafer, the probing apparatus being arranged so that the positions of the probe needles of the sheet-like member, when it is held by a holder of the probing apparatus, are detected automatically and, in accordance with the detected positions, the sheet-like member is displaced automatically so as to be aligned with the probing apparatus. According to another aspect of the invention, the position of the wafer when it is at a location under the probe needles is detected automatically and, in accordance with the detected position, the wafer is displaced so as to be aligned with the sheet-like member which has been aligned automatically with the probing apparatus. In one preferred form, a TV camera is provided at a position above the probing station, the TV camera being adapted to view the probe needles of the sheet-like member during positioning of it and to view the wafer when it is at a probing station, during positioning of the wafer.

REFERENCES:
patent: 3899634 (1975-08-01), Montone
patent: 4382228 (1983-05-01), Evans
patent: 4538177 (1985-08-01), Morison

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