Wafer probecard interface

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Details

C324S754090, C324S758010, C439S066000

Reexamination Certificate

active

07071724

ABSTRACT:
Apparatus and method for testing a device wafer having a plurality of devices formed thereon. One embodiment of the invention provides an interface wafer comprising a plurality of contact pads disposed on a first surface for contacting a plurality of device pads on the device wafer and a plurality of interface pads disposed on a second surface for contacting probe needles on a probe card, wherein the plurality of interface pads are electrically connected to the plurality of contact pads and wherein the plurality of interface pads are disposed in a relaxed-pitch arrangement as compared to the plurality of contact pads.

REFERENCES:
patent: 6624646 (2003-09-01), Zaiser
patent: 6707065 (2004-03-01), Fenner et al.
patent: 6812718 (2004-11-01), Chong et al.
patent: 6847218 (2005-01-01), Nulty et al.
patent: 2002/0132501 (2002-09-01), Eldridge et al.
patent: 2004/0223309 (2004-11-01), Haemer et al.

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