Wafer probe with transparent loading member

Details Wafer probe with transparent loading member Wafer probe with transparent loading member

1990-08-09

1991-10-22

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, G01R 106

Patent

active

050598988

ABSTRACT:
A probe head for establishing electrically conductive contact with an electronic device comprises a loading member having an attachment portion for attachment to a support structure. A cantilever arm is attached at a first end to the attachment portion and has a second end spaced from the attachment portion. A flexible sheet of insulating material is attached at a first end region to the second end of the cantilever arm with a first main face of the flexible sheet confronting the cantilever arm. A first array of contact elements is exposed at the second main face of the sheet at the first end region thereof, whereby the sheet of insulating material is between the cantilever arm and the contact elements of the first array. A second array of contact elements is exposed at a second end region of the sheet, spaced from the first end region, and conductor runs connect the contact elements of the first array with respective contact elements of the second array.

REFERENCES:
patent: 3810016 (1974-05-01), Chayka et al.
patent: 4758785 (1988-06-01), Rath
patent: 4891585 (1990-01-01), Janko et al.
patent: 4912399 (1990-03-01), Greub et al.
patent: 4918383 (1990-04-01), Huff et al.
patent: 4943768 (1990-07-01), Niki et al.
patent: 4961052 (1990-10-01), Tada et al.
patent: 4963821 (1990-10-01), Janko et al.

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