Wafer probe station with integrated environment control enclosur

Details Wafer probe station with integrated environment control enclosur Wafer probe station with integrated environment control enclosur

1992-05-29

1993-11-30

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, G01R 3102, G01R 1073

Patent

active

052668894

ABSTRACT:
A wafer probe station is equipped with a compact, integrated controlled-environment enclosure providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck and test probe provided by the enclosure is maintained despite the fact that the probe and chuck positioning mechanisms extend partially outside the enclosure, with positioning members extending movably between the interior and exterior of the enclosure. Sealing is maintained by movable sealing members at the locations where the positioning members penetrate the enclosure.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 4115736 (1978-09-01), Tracy
patent: 5077523 (1991-12-01), Blanz
Micromanipulator Company, Inc., "Test Station Accessories," 1983.
Temptronic Corporation, "Application Note 1-Controlled Environment Enclosure for Low Temperature Wafer Probing in a Moisture-Free Environment," undated.
Temptronic Corporation, "Model TPO3000 Series Thermo Chuck Systems," undated.
Y. Yamamoto, "A Compact Self-Shielding Prober for Accurate Measurement of On-Wafer Electron Devices," IEEE Trans., Instrumentation and Measurement, vol. 38, pp. 1088-1093, 1989.

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