Wafer probe station having integrated guarding, Kelvin connectio

Details Wafer probe station having integrated guarding, Kelvin connectio Wafer probe station having integrated guarding, Kelvin connectio

1994-05-18

1995-07-18

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

3241581, G01R 3102, G01R 1073

Patent

active

054345120

ABSTRACT:
A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly which consists of at least three chuck assembly elements. A first element supports the test device, while an underlying second element acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element. Ready-to-use, selectively detachable electrical connector assemblies provide for signal and guard connections to the first and second chuck assembly elements, respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors for individually-positionable probes provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.

REFERENCES:
patent: 3185927 (1965-05-01), Margulis et al.
patent: 3710251 (1973-01-01), Hagge et al.
patent: 4115736 (1978-09-01), Tracy
patent: 4856904 (1989-08-01), Akagawa
patent: 5077523 (1991-12-01), Blanz

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