Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1992-06-11
1994-09-06
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
3241581, 324761, G01R 3102, G01R 1073
Patent
active
053451708
ABSTRACT:
A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly which consists of at least three chuck assembly elements. A first element supports the test device, while an underlying second element acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element. Ready-to-use, selectively detachable electrical connector assemblies provide for signal and guard connections to the first and second chuck assembly elements, respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors for individually-positionable probes provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.
REFERENCES:
patent: 4856904 (1989-08-01), Akagawa
patent: 5077523 (1991-12-01), Blanz
Article by William Knauer entitled "Fixturing for Low-Current/Low Voltage Parametric Testing," appearing in Evaluation Engineering, Nov. 1990, pp. 150-153.
Hewlett-Packard, "Application Note 356-HP 4142B Modular DC Source/Monitor Practical Application," (1987) pp. 1-4 (no month).
Hewlett-Packard, H-P Model 4284A Precision LCR Meter, Operation Manual (1991) pp. 2-1, 6-9, and 6-15. (no month).
Article by Yousuke Yamamoto, entitled "A Compact Self-Shielding Prober for Accurate Measurement of On-Wafer Electron Devices," appearing in IEEE Transactions on Instrumentation and Measurement, vol. 38, No. 6, Dec. 1989, pp. 1088-1093.
Andrews Peter D.
Harwood Warren K.
Schwindt Randy J.
Smith Kenneth R.
Tervo Paul A.
Cascade Microtech, Inc.
Karlsen Ernest F.
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