Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1993-08-02
1995-10-10
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
3241581, 324761, G01R 3102, G01R 1073
Patent
active
054573980
ABSTRACT:
A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.
REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 4115736 (1978-09-01), Tracy
patent: 4856904 (1989-08-01), Akagawa
patent: 5077523 (1991-12-01), Blanz
Article by William Knauer entitled "Fixturing for Low-Current/Low Voltage Parametric Testing," appearing in Evaluation Engineering, Nov., 1990, pp. 150-153.
Hewlett-Packard, "Application Note 356-HP 4142B Modular DC Source/ Monitor Practical Application," (1987) pp. 1-4.
Hewlett-Packard, H-P Model 4284A Precision LCR Meter, Operation Manual (1991) pp. 2-1, 6-9, and 6-15.
Article by Yousuke Yamamoto, entitled "A Compact Self-Shielding Prober for Accurate Measurement of On-Wafer Electron Devices," appearing in IEEE Transactions on Instrumentation and Measurement, vol. 38, No. 6, Dec., 1989, pp. 1088-1093.
Temptronics "Guarded" Chuck, one-page note describing guarding system of Temptronic Corporation of Newton, Massachusetts, dated Nov. 15, 1989.
Harwood Warren K.
Schwindt Randy J.
Tervo Paul A.
Cascade Microtech, Inc.
Karlsen Ernest F.
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