Wafer probe station having environment control enclosure

Details Wafer probe station having environment control enclosure Wafer probe station having environment control enclosure

2008-03-25

2008-03-25

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB, C324S762010

Reexamination Certificate

active

11317400

ABSTRACT:
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.

REFERENCES:
patent: 1337866 (1920-04-01), Whitaker
patent: 2142625 (1939-01-01), Zoethout
patent: 2197081 (1940-04-01), Piron
patent: 2376101 (1945-05-01), Tyzzer
patent: 2389668 (1945-11-01), Johnson
patent: 2471897 (1949-05-01), Rappl
patent: 2812502 (1957-11-01), Doherty
patent: 3176091 (1965-03-01), Hanson et al.
patent: 3185927 (1965-05-01), Margulis et al.
patent: 3192844 (1965-07-01), Szasz et al.
patent: 3193712 (1965-07-01), Harris
patent: 3201721 (1965-08-01), Voelcker
patent: 3230299 (1966-01-01), Radziejowski
patent: 3256484 (1966-06-01), Terry
patent: 3265969 (1966-08-01), Catu
patent: 3289046 (1966-11-01), Carr
patent: 3333274 (1967-07-01), Forcier
patent: 3405361 (1968-10-01), Kattner et al.
patent: 3408565 (1968-10-01), Frick et al.
patent: 3435185 (1969-03-01), Gerard
patent: 3484679 (1969-12-01), Hodgson et al.
patent: 3596228 (1971-07-01), Reed, Jr. et al.
patent: 3602845 (1971-08-01), Agrios et al.
patent: 3609539 (1971-09-01), Gunthert
patent: 3648169 (1972-03-01), Wiesler
patent: 3654573 (1972-04-01), Graham
patent: 3662318 (1972-05-01), Decuyper
patent: 3700998 (1972-10-01), Lee et al.
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3714572 (1973-01-01), Ham et al.
patent: 3740900 (1973-06-01), Youmans et al.
patent: 3775644 (1973-11-01), Cotner et al.
patent: 3777260 (1973-12-01), Davies et al.
patent: 3810017 (1974-05-01), Wiesler et al.
patent: 3814888 (1974-06-01), Bowers et al.
patent: 3829076 (1974-08-01), Sofy
patent: 3858212 (1974-12-01), Tompkins et al.
patent: 3863181 (1975-01-01), Glance et al.
patent: 3866093 (1975-02-01), Kusters et al.
patent: 3930809 (1976-01-01), Evans
patent: 3936743 (1976-02-01), Roch
patent: 3952156 (1976-04-01), Lahr
patent: 3970934 (1976-07-01), Aksu
patent: 3976959 (1976-08-01), Gaspari
patent: 3992073 (1976-11-01), Buchoff et al.
patent: 3996517 (1976-12-01), Fergason et al.
patent: 4001685 (1977-01-01), Roch
patent: 4008900 (1977-02-01), Khoshaba
patent: 4009456 (1977-02-01), Hopfer
patent: 4027253 (1977-05-01), Chiron et al.
patent: 4035723 (1977-07-01), Kvaternik
patent: 4038894 (1977-08-01), Knibbe et al.
patent: 4042119 (1977-08-01), Hassan et al.
patent: 4049252 (1977-09-01), Bell
patent: 4066943 (1978-01-01), Roch
patent: 4072576 (1978-02-01), Arwin et al.
patent: 4093988 (1978-06-01), Scott
patent: 4099120 (1978-07-01), Aksu
patent: 4115735 (1978-09-01), Stanford
patent: 4115736 (1978-09-01), Tracy
patent: 4116523 (1978-09-01), Coberly et al.
patent: 4135131 (1979-01-01), Larsen et al.
patent: 4151465 (1979-04-01), Lenz
patent: 4161692 (1979-07-01), Tarzwell
patent: 4172993 (1979-10-01), Leach
patent: 4186338 (1980-01-01), Fichtenbaum
patent: 4275446 (1981-06-01), Blaess
patent: 4277741 (1981-07-01), Faxvog et al.
patent: 4280112 (1981-07-01), Eisenhart
patent: 4284033 (1981-08-01), del Rio
patent: 4284682 (1981-08-01), Frosch et al.
patent: 4287473 (1981-09-01), Sawyer
patent: 4327180 (1982-04-01), Chen
patent: 4330783 (1982-05-01), Toia
patent: 4342958 (1982-08-01), Russell
patent: 4346355 (1982-08-01), Tsukii
patent: 4352061 (1982-09-01), Matrone
patent: 4357575 (1982-11-01), Uren et al.
patent: 4365109 (1982-12-01), O'Loughlin
patent: 4365195 (1982-12-01), Stegens
patent: 4371742 (1983-02-01), Manly
patent: 4376920 (1983-03-01), Smith
patent: 4383178 (1983-05-01), Shibata et al.
patent: 4383217 (1983-05-01), Shiell
patent: 4401945 (1983-08-01), Juengel
patent: 4414638 (1983-11-01), Talambrias
patent: 4419626 (1983-12-01), Cedrone et al.
patent: 4425395 (1984-01-01), Negishi et al.
patent: 4426619 (1984-01-01), Demand
patent: 4453142 (1984-06-01), Murphy
patent: 4468629 (1984-08-01), Choma, Jr.
patent: 4473798 (1984-09-01), Cedrone et al.
patent: 4479690 (1984-10-01), Inouye et al.
patent: 4480223 (1984-10-01), Aigo
patent: 4487996 (1984-12-01), Rabinowitz et al.
patent: 4491173 (1985-01-01), Demand
patent: 4503335 (1985-03-01), Takahashi
patent: 4507602 (1985-03-01), Aguirre
patent: 4515133 (1985-05-01), Roman
patent: 4515439 (1985-05-01), Esswein
patent: 4528504 (1985-07-01), Thornton, Jr. et al.
patent: 4531474 (1985-07-01), Inuta
patent: 4532423 (1985-07-01), Tojo et al.
patent: 4552033 (1985-11-01), Marzhauser
patent: 4557599 (1985-12-01), Zimring
patent: 4566184 (1986-01-01), Higgins et al.
patent: 4567321 (1986-01-01), Harayama
patent: 4567908 (1986-02-01), Bolsterli
patent: 4575676 (1986-03-01), Palkuti
patent: 4588950 (1986-05-01), Henley
patent: 4588970 (1986-05-01), Donecker et al.
patent: 4621169 (1986-11-01), Petinelli et al.
patent: 4626618 (1986-12-01), Takaoka et al.
patent: 4641659 (1987-02-01), Sepponen
patent: 4642417 (1987-02-01), Ruthrof et al.
patent: 4646005 (1987-02-01), Ryan
patent: 4651115 (1987-03-01), Wu
patent: 4665360 (1987-05-01), Phillips
patent: 4673839 (1987-06-01), Veenendaal
patent: 4675600 (1987-06-01), Gergin
patent: 4680538 (1987-07-01), Dalman et al.
patent: 4684883 (1987-08-01), Ackerman et al.
patent: 4691163 (1987-09-01), Blass et al.
patent: 4691831 (1987-09-01), Suzuki et al.
patent: 4694245 (1987-09-01), Frommes
patent: 4695794 (1987-09-01), Bargett et al.
patent: 4697143 (1987-09-01), Lockwood et al.
patent: 4703433 (1987-10-01), Sharrit
patent: 4705447 (1987-11-01), Smith
patent: 4711563 (1987-12-01), Lass
patent: 4712370 (1987-12-01), MacGee
patent: 4713347 (1987-12-01), Mitchell et al.
patent: 4725793 (1988-02-01), Igarashi
patent: 4727637 (1988-03-01), Buckwitz et al.
patent: 4730158 (1988-03-01), Kasai et al.
patent: 4731577 (1988-03-01), Logan
patent: 4734872 (1988-03-01), Eager et al.
patent: 4739259 (1988-04-01), Hadwin et al.
patent: 4742571 (1988-05-01), Letron
patent: 4744041 (1988-05-01), Strunk et al.
patent: 4746857 (1988-05-01), Sakai et al.
patent: 4754239 (1988-06-01), Sedivec
patent: 4755746 (1988-07-01), Mallory et al.
patent: 4755747 (1988-07-01), Sato
patent: 4755874 (1988-07-01), Esrig et al.
patent: 4757255 (1988-07-01), Margozzi
patent: 4758785 (1988-07-01), Rath
patent: 4759712 (1988-07-01), Demand
patent: 4766384 (1988-08-01), Kleinberg et al.
patent: 4771234 (1988-09-01), Cook et al.
patent: 4771846 (1988-09-01), Reeds
patent: 4772846 (1988-09-01), Reeds
patent: 4777434 (1988-10-01), Miller et al.
patent: 4780670 (1988-10-01), Cherry
patent: 4783625 (1988-11-01), Harry et al.
patent: 4784213 (1988-11-01), Eager et al.
patent: 4786867 (1988-11-01), Yamatsu
patent: 4787752 (1988-11-01), Fraser et al.
patent: 4791363 (1988-12-01), Logan
patent: 4795962 (1989-01-01), Yanagawa et al.
patent: 4805627 (1989-02-01), Klingenbeck et al.
patent: 4810981 (1989-03-01), Herstein
patent: 4812754 (1989-03-01), Tracy et al.
patent: 4816767 (1989-03-01), Cannon et al.
patent: 4818169 (1989-04-01), Schram et al.
patent: 4827211 (1989-05-01), Strid et al.
patent: 4831494 (1989-05-01), Arnold et al.
patent: 4838802 (1989-06-01), Soar
patent: 4839587 (1989-06-01), Flatley et al.
patent: 4845426 (1989-07-01), Nolan et al.
patent: 4849689 (1989-07-01), Gleason
patent: 4853613 (1989-08-01), Sequeira et al.
patent: 4853624 (1989-08-01), Rabjohn
patent: 4853627 (1989-08-01), Gleason et al.
patent: 4856426 (1989-08-01), Wirz
patent: 4856904 (1989-08-01), Akagawa
patent: 4858160 (1989-08-01), Strid et al.
patent: 4859989 (1989-08-01), McPherson
patent: 4864227 (1989-09-01), Sato
patent: 4871883 (1989-10-01), Guiol
patent: 4871965 (1989-10-01), Elbert et al.
patent: 4884026 (1989-11-01), Hayakawa et al.
patent: 4884206 (1989-11-01), Mate
patent: 4888550 (1989-12-01), Reid
patent: 4891584 (1990-01-01), Kamieniecki et al.
patent: 4893914 (1990

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