Wafer probe station having environment control enclosure

Details Wafer probe station having environment control enclosure Wafer probe station having environment control enclosure

2006-03-07

2006-03-07

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S754090

Reexamination Certificate

active

07009383

ABSTRACT:
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.

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