Wafer probe station

Details Wafer probe station Wafer probe station

2005-07-12

2005-07-12

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S754090, C324S760020

Reexamination Certificate

active

06917195

ABSTRACT:
The invention relates to a chuck apparatus for a wafer probe station in which the central conductive surface supports a device-under-test (DUT) over a conductive lower chuck portion. An insulator positions the center conductor surface of the chuck above the lower chuck portion and also positions an electrically isolated conductor along its periphery. A laterally extending shielding element is provided for shielding electromagnetic interference (EMI) from the center conductor surface and the lower chuck portion. The electrically isolated conductor and the conductive lower chuck portion may cooperate to form a line-of-sight electrical barrier between the center conductor surface and the laterally extending shielding element. The invention further relates to methods of manufacturing the chuck apparatus and using the apparatus to accomplish low current and voltage tests in a probe station.

REFERENCES:
patent: 5345170 (1994-09-01), Schwindt et al.
patent: 5963027 (1999-10-01), Peters
patent: 6002263 (1999-12-01), Peters et al.

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