Wafer probe

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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Details

324158F, 324 73PC, 333246, G01R 106, H01P 308

Patent

active

047647230

ABSTRACT:
A wafer probe for testing semiconductor devices brings low impedance connections closely adjacent device bonding pads for bypassing power supply voltages.

REFERENCES:
patent: 4184133 (1980-01-01), Gehle
patent: 4551747 (1985-11-01), Gilbert et al.
patent: 4553111 (1985-11-01), Barrow
patent: 4593243 (1986-06-01), Lao et al.
Bry et al., "By Pan Capacitor for Chip Probe"; IBM Technical Disclosure Bulletin; vol. 18, No. 11, 04/1976.

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