Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-11-10
1988-08-16
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158F, 324 73PC, 333246, G01R 106, H01P 308
Patent
active
047647230
ABSTRACT:
A wafer probe for testing semiconductor devices brings low impedance connections closely adjacent device bonding pads for bypassing power supply voltages.
REFERENCES:
patent: 4184133 (1980-01-01), Gehle
patent: 4551747 (1985-11-01), Gilbert et al.
patent: 4553111 (1985-11-01), Barrow
patent: 4593243 (1986-06-01), Lao et al.
Bry et al., "By Pan Capacitor for Chip Probe"; IBM Technical Disclosure Bulletin; vol. 18, No. 11, 04/1976.
Cascade Microtech, Inc.
Eisenzopf Reinhard J.
Nguyen Vinh P.
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