Wafer positioning apparatus

Details Wafer positioning apparatus Wafer positioning apparatus

1988-10-13

1990-09-11

Bucci, David A.

Material or article handling

Horizontally swinging load support

Swinging about pivot

901 47, 901 6, 250548, 414783, 4147445, B25J 1308

Patent

active

049557807

ABSTRACT:
A wafer positioning apparatus includes at least first, second and third optical position detectors for detecting a circumference portion of a wafer. The first to third optical position detectors are arranged on a circumference of a circle having a diameter identical to that of the wafer. A transportation robot is used for holding the wafer and moving the held wafer with respect to the first to third optical position detectors. A control circuit controls the transportation robot in accordance with output signals of the first to third optical position detectors so that all of the first to third optical position detectors detect the circumference portion of the wafer at the same time.

REFERENCES:
patent: 3820647 (1974-06-01), Waugh, Jr. et al.
patent: 4024944 (1977-05-01), Adams et al.
patent: 4483654 (1984-11-01), Koch et al.
patent: 4584045 (1986-04-01), Richards
patent: 4633419 (1986-12-01), Niiho et al.
patent: 4770590 (1988-09-01), Hugues
patent: 4819167 (1989-04-01), Cheng

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