Wafer pod with working sheet holder

Details Wafer pod with working sheet holder Wafer pod with working sheet holder

2008-04-15

2008-04-15

Bui, Luan K (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S232000, C206S454000

Reexamination Certificate

active

11242701

ABSTRACT:
A wafer pod. The wafer pod comprises a main body, a working sheet holder disposed on the main body, and a lock disposed between the working sheet holder and the main body. The working sheet holder is fixed to the main body by the lock to form an accommodating space.

REFERENCES:
patent: 4582219 (1986-04-01), Mortensen et al.
patent: 5165546 (1992-11-01), Jaeger et al.
patent: 5669508 (1997-09-01), Chen et al.
patent: 5678693 (1997-10-01), Tapp et al.
patent: 6098809 (2000-08-01), Okada et al.
patent: 2004342844 (2004-12-01), None

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