Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1982-05-24
1985-02-12
Spar, Robert J.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414222, 414417, 118729, 118730, B65H 100
Patent
active
044988338
ABSTRACT:
Apparatus for programmably orienting a semiconductor wafer in an ion implantation system so as to limit channeling or to control the depth of penetration of impinging ions. The apparatus is associated with a processing chamber door and includes a rotatable vacuum chuck for engaging the wafer and a motor for rotating the vacuum chuck and the wafer through a preselected angular displacement. The apparatus further includes a programmable control assembly operative to deenergize the motor upon sensing rotation of the vacuum chuck through the preselected angular displacement. The wafer orientation apparatus is typically utilized in a system for the vertical transfer of wafers between a cassette and a processing chamber.
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Gruber, L. W. and Mustis, B.; Wafer Chuck Air Flow; IBM Technical Disclosure Bulletin; vol. 18, No. 6; Nov., 1975.
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Bucci David A.
Cole Stanley Z.
McClellan William R.
Spar Robert J.
Varian Associates Inc.
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