Conveyors: power-driven – With means to facilitate working – treating – or inspecting... – Condition responsive control of conveyor or station apparatus
Patent
1992-02-04
1993-09-28
Yasich, Daniel M.
Conveyors: power-driven
With means to facilitate working, treating, or inspecting...
Condition responsive control of conveyor or station apparatus
1988321, 269 63, 340686, 4147442, B23P 1606, B65H 900
Patent
active
052480240
ABSTRACT:
A mount plate has a disc-shaped body having a wafer-mounting surface on which semiconductor wafers are to be mounted for polishing. The mount plate is carried by a rotary support which is rotatably indexed to different angular positions which correspond to angularly spaced locations on the wafer-mounting surface where the wafers are to be mounted. An indicator is embedded in the mount plate, preferably at the peripheral side edge thereof, and coacts with a sensor for indicating when the mount plate is indexed to a predetermined initial start position, thereby enabling automatic mounting of the wafers at the same locations on the wafer-mounting surface during each use of the mount plate. The indicator is preferably inserted in a recessed portion of the mount plate body and is covered by a transparent material so that the indicator is visible through the transparent material. The indicator may comprise a marking of a different color than the surrounding region of the mount body, alphanumeric characters, bar code indications or the like.
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Adams Bruce L.
Enya Systems Limited
Wilks Van C.
Yasich Daniel M.
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