Wafer-mounted micro-probing platform

Details Wafer-mounted micro-probing platform Wafer-mounted micro-probing platform

2006-04-04

2006-04-04

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S758010, C324S765010

Reexamination Certificate

active

07023225

ABSTRACT:
A method and apparatus for probing semiconductor circuits using a wafer-mounted micro-probing platform. A platform or platen is affixed to the surface of a wafer. Probe manipulators are mounted on the platen, and probes extend from or are otherwise associated with the probe manipulators. The probe manipulators may be fixed in position, or they may be motorized to allow adjustment of the probe positions while in-situ. During probing, electrical signals are preferably sent to the probes viz.-a-viz. feedthrough interfaces. The platen which is affixed to the surface of the wafer effectively serves two purposes: 1) as a mounting point for the probe manipulators; and 2) to mechanically stiffen the wafer so that the wafer does not flex, thereby requiring re-positioning of the probes.

REFERENCES:
patent: 4266191 (1981-05-01), Spano et al.
patent: 4623839 (1986-11-01), Garretson et al.
patent: 5959461 (1999-09-01), Brown et al.
patent: 6031383 (2000-02-01), Streib et al.
patent: 6198299 (2001-03-01), Hollman
patent: 6605951 (2003-08-01), Cowan

Affiliated with

Also associated with

Rating

Wafer-mounted micro-probing platform does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer-mounted micro-probing platform, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer-mounted micro-probing platform will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3551900