Wafer map analysis aid system, wafer map analyzing method and wa

Details Wafer map analysis aid system, wafer map analyzing method and wa Wafer map analysis aid system, wafer map analyzing method and wa

1998-02-19

2000-10-03

Au, Amelia

Image analysis

Applications

Manufacturing or product inspection

382141, 382147, 36446801, 364489, G06K 900

Patent

active

061284033

ABSTRACT:
In order to solve various problems of a wafer, two-dimensional analysis using a wafer map is aided. An image of the wafer map is classified and displayed on a screen for each item such as a manufacturing step, a device and inspection. A trend chart is also attached in addition to the image of the wafer map.

REFERENCES:
patent: 5673198 (1997-09-01), Lawman et al.
patent: 5710700 (1998-01-01), Kurtzberg et al.
patent: 5754826 (1998-05-01), Gamal et al.
patent: 5777876 (1998-07-01), Beauchesne
patent: 5787190 (1998-07-01), Peng et al.
patent: 5838951 (1998-11-01), Song
patent: 5870308 (1999-02-01), Dangelo et al.

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