Wafer loading device

Details Wafer loading device Wafer loading device

1980-09-03

1983-03-29

Sheridan, Robert G.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

118500, 118730, 414331, 414737, C23C 1308

Patent

active

043781896

ABSTRACT:
An apparatus to mount wafers for sublimation plating on a rotary type wafer holding dome having more than one wafer mounting seat of window type on its circumference comprising a wafer cassette that holds many sheets of wafers piled up with spacing and holding pieces in-between and is driven up-and-down at the same intervals as wafer mounting, a rotary arm having a sucker on the top end with the said wafer mounting seats on its rotation locus, and a conveyor mechanism to receive a piece of wafer at the end of the wafer cassette and to transfer the wafer to a position on the other rotation locus at the top end of the said rotary arm. The rotation of the wafer holding dome at the same intervals as the wafer mounting seats, up-down motion of the said wafer cassette, the conveyor mechanism and also the rotational driving of the rotary arm are controlled by interlocked sequence to enable automatic and effective loading and unloading between the wafer cassette and wafer holding dome without any contamination or damage to the wafers.

REFERENCES:
patent: 3902615 (1975-09-01), Levy et al.
patent: 4208159 (1980-06-01), Uehara et al.

Affiliated with

Also associated with

Rating

Wafer loading device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer loading device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer loading device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1202564