Wafer loading and unloading mechanism for loading robot

Details Wafer loading and unloading mechanism for loading robot Wafer loading and unloading mechanism for loading robot

1999-01-12

2000-04-11

Butler, Rodney

Abrading

Work feeder

Ejector or unloader

451332, B24B 4702

Patent

active

060482591

ABSTRACT:
A wafer loading and unloading mechanism is arranged in such a way that polished wafers stored in the loading cassette in a loading robot are not subject to dust contamination. The mechanism for moving loading cassettes mounted in a loading robot upward and downward is provided under the loading cassettes in order to prevent polished wafers from being contaminated with dust which may be generated or become airborne when driving force is transmitted.

REFERENCES:
patent: 1722589 (1929-07-01), Miller, Jr.
patent: 2602275 (1952-07-01), Maly
patent: 5865670 (1999-02-01), Frank et al.
patent: 5893794 (1997-02-01), Togawa et al.

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