Wafer load lock and magnetically coupled linear delivery system

Details Wafer load lock and magnetically coupled linear delivery system Wafer load lock and magnetically coupled linear delivery system

2005-08-30

2005-08-30

Dillon, Jr., Joe (Department: 3651)

Material or article handling

Apparatus for moving material between zones having different...

C414S939000, C198S619000

Reexamination Certificate

active

06935828

ABSTRACT:
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical, drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.

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