Wafer lifting device

Details Wafer lifting device Wafer lifting device

2007-02-20

2007-02-20

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C438S800000

Reexamination Certificate

active

10622050

ABSTRACT:
The invention, which relates to a wafer lifting device having a lifting platform arranged under a wafer receptacle, which lifting platform can be moved in the vertical direction and at least three pins which can be moved in through holes in the wafer receptacle. The pins are separately guided in the through holes. A pin is guided and held such that it can be moved longitudinally, and the pin guide is fixedly connected to the wafer receptacle.

REFERENCES:
patent: 5669977 (1997-09-01), Shufflebotham et al.
patent: 5848670 (1998-12-01), Salzman
patent: 6572708 (2003-06-01), Gujer et al.
patent: 6646857 (2003-11-01), Anderson et al.
patent: 274708 (1989-12-01), None
patent: 05-129421 (1993-05-01), None
patent: 05129421 (1993-05-01), None
patent: 0700702 (1995-01-01), None
patent: 07007072 (1995-01-01), None

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