Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor
Reexamination Certificate
2011-05-10
2011-05-10
Roman, Angel (Department: 2812)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
C438S113000, C438S118000, C438S122000, C257S707000, C257S783000, C257SE21001
Reexamination Certificate
active
07939368
ABSTRACT:
A wafer level chip scale package system is provided forming a wafer having an interconnect provided on an active side, forming a thermal sheet having a first thermal interface material layer and a thermal conductive layer, and attaching the thermal sheet on a non-active side of the wafer.
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Chow Seng Guan
Do Byung Tai
Kuan Heap Hoe
Ishimaru Mikio
Roman Angel
Stats Chippac Ltd.
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