Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1989-05-25
1992-04-14
Weider, Kenneth A.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158R, 356401, 901 44, G01R 106, G06F 1546
Patent
active
051051478
ABSTRACT:
A system for the semiautomatic inspection of printed circuits on silicon wafers and other similar micro-electronic products which comprises in combination a floating table supporting a robot arm which has the function of grabbing a single wafer from a cassette in which it is housed, inverting same, or assuming a position with its axis defining the Y-axis of the scanning system, and of moving in this direction; and of placing after inspection such wafer in another cassette according to the grade it received; an optical inspection device, such as optical microscope combined with a TV camera or the like attached to said same table, said microscope being adapted to move in the direction of the X-coordinate of the inspection system, there being provided means for aligning the direction of the printed circuit with the X-Y coordinates of the scanning system. A sophisticated optoscanner system is used for the alignment of the wafer and for establishing its exact position. The wafer is held by a vacuum gripper from the moment of its removal from the first cassette and up to its insertion into another one.
REFERENCES:
patent: 4103232 (1978-07-01), Sugita et al.
patent: 4516253 (1985-05-01), Novak
patent: 4604715 (1986-08-01), Toutant et al.
patent: 4653011 (1987-03-01), Iwano
patent: 4656358 (1987-04-01), Divens et al.
patent: 4694243 (1987-09-01), Miller et al.
patent: 4755746 (1988-07-01), Mallory et al.
patent: 4772846 (1988-09-01), Reeds
patent: 4786867 (1988-11-01), Yamatsu
Ilssar Yoel
Karasikov Nir
Galai Laboratories Ltd.
Nguyen Vinh P.
Weider Kenneth A.
LandOfFree
Wafer inspection system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Wafer inspection system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer inspection system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2352174