Wafer inspection device

Details Wafer inspection device Wafer inspection device

2008-09-09

2008-09-09

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C324S719000

Reexamination Certificate

active

10563499

ABSTRACT:
A semiconductor substrate or wafer inspection device for detecting defects on wafer surfaces includes an air-cushion stage which can be displaced in two directions (X,Y) that are perpendicular to one another. Several air nozzles are provided for this purpose. At least one valve is connected to at least one electric control unit, the valve being configured in such a way that a normal pressure prevails in the air nozzles when the electric control unit delivers a corresponding signal.

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patent: 6864602 (2005-03-01), Korenaga
patent: 7241993 (2007-07-01), Nakasuji et al.
patent: 2001/0030739 (2001-10-01), Hase et al.
patent: 01 230986 (1989-09-01), None

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