Wafer inspecting system

Details Wafer inspecting system Wafer inspecting system

1993-10-04

1996-01-30

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324754, G01R 3102

Patent

active

054882923

ABSTRACT:
A wafer inspecting system is provided, in which the inspecting time for one cassette stocking plurality of wafers are shortened. The wafer, which is stored in the cassette among four cassettes stocked in the cassette stocking part, is taken out from the cassette by the automated truck of the wafer conveying system one by one, and then, conveyed to the respective wafer probers by the automated truck. And, the wafer that has been inspected by the respective wafer probers is conveyed to the former cassette and stored by the automated trucks, and further, another wafer to be inspected is taken out from the cassette 36A and conveyed to one of the wafer probers. And, when all wafers stored in the cassette have been inspected, the cassette is taken out from the cassette stocking part and the following steps are performed. As a result, the inspecting time for one cassette can be shortened substantially.

REFERENCES:
patent: 3665504 (1972-05-01), Silverman
patent: 3758857 (1973-09-01), Simpson et al.
patent: 4429275 (1984-01-01), Cedrone
patent: 4868493 (1989-09-01), Becker
patent: 4900939 (1990-02-01), Aoyama
patent: 5256204 (1993-10-01), Wu

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