Wafer indexing system using a grid pattern and coding and orient

Details Wafer indexing system using a grid pattern and coding and orient Wafer indexing system using a grid pattern and coding and orient

1977-03-24

1979-01-09

Corcoran, Robert J.

Electricity: measuring and testing

Magnetic

Magnetic information storage element testing

96 27R, 29574, 365 1, G01R 3300

Patent

active

041340663

ABSTRACT:
A wafer indexing and mapping system is useful for precisely locating artifacts, defects, and fabricated structural components on a wafer. A permanent micrometer grid pattern is applied to the backside of the wafer, for example, a transparent bubble wafer. The grid pattern forms an array of uniform size cells, for example, 40 unit cells wide by 40 unit cells long. Each unit cell is divided into smaller units on each side. Each cell contains a coding or indexing system to identify the row and column of the cell in the grid pattern. The grid pattern contains orientation bars which identify orientation with respect to particular wafer reference lines. The simultaneous viewing of the wafer and the grid pattern permits an accurate permanent mapping of the artifacts, defects, and fabricated structural components on the wafer, as well as on the individual small chips formed by dicing the wafer.

REFERENCES:
patent: 3259037 (1966-07-01), Wilkinson, Jr.
patent: 3607347 (1971-09-01), Sprague
patent: 3742229 (1973-06-01), Smith et al.
patent: 3863764 (1975-02-01), Myslinski et al.
patent: 3998639 (1976-12-01), Feldman et al.
Fahrni et al., Wafer Identification, IBM Tech. Bull., vol. 14, No. 4, Sep. 1971, pp. 1030-1031.

Affiliated with

Also associated with

Rating

Wafer indexing system using a grid pattern and coding and orient does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer indexing system using a grid pattern and coding and orient, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer indexing system using a grid pattern and coding and orient will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1790442